Case Study | Flow In Semiconductor Chemical Blending

Learn how precision Coriolis flow measurement helped improve chemical blending accuracy, reduce waste, and support consistent production in a critical semiconductor manufacturing process.

The Challenge

As demand for advanced semiconductors continued to grow, a leading manufacturer of high-purity photosensitive materials expanded production capacity to support increasing wafer fabrication requirements.

One of the most critical process steps involved blending high-purity chemicals used in the production of photoresists. Solvents such as acetone, methanol, and specialty organic chemicals had to be combined with exceptional accuracy to ensure consistent product quality from batch to batch.

Even minor deviations in chemical ratios could result in:

• Off-spec product batches
• Increased raw material consumption
• Reduced production efficiency
• Higher operating costs
• Quality issues affecting downstream semiconductor manufacturing

The facility required a flow measurement solution capable of delivering highly accurate mass flow measurement while minimizing maintenance and supporting continuous operation.

The Solution

TechStar worked with the customer to evaluate flow measurement technologies capable of meeting the demanding accuracy requirements of semiconductor chemical manufacturing.

After reviewing several Coriolis flowmeter options, the customer selected the Yokogawa ROTAMASS TI Coriolis Flowmeter for its exceptional measurement accuracy, long-term stability, and maintenance-free operation.

The ROTAMASS TI provided direct mass flow measurement with ±0.1% accuracy, allowing operators to precisely control chemical dosing during blending operations. This improved process repeatability while reducing waste associated with over- or under-feeding expensive raw materials.

Results

Following implementation, the facility realized several operational benefits:

• Improved batch-to-batch consistency
• More precise control of high-purity chemical blending
• Reduced chemical waste
• Lower operating costs through improved dosing accuracy
• Increased production reliability
• Maintenance-free operation that minimized downtime
• Flexible installation with both integral and remote transmitter options

Why Accurate Flow Measurement Matters

Semiconductor manufacturing depends on exceptionally tight process control.

Whether producing photoresists, specialty chemicals, CMP slurries, or other high-purity process materials, precise mass flow measurement helps manufacturers:

• Maintain consistent product quality
• Improve production yield
• Reduce costly material losses
• Increase process repeatability
• Support continuous manufacturing operations

High-performance Coriolis technology provides direct mass flow measurement without relying on changes in fluid properties, making it an ideal solution for high-value chemical applications throughout semiconductor manufacturing.

TechStar's Value

Selecting the right flowmeter is only part of the equation.

TechStar helps semiconductor manufacturers optimize critical processes through:

• Application engineering
• Instrument technology selection
• Startup and commissioning
• Process optimization
• Calibration support
• Ongoing field service
• Local technical expertise

Whether measuring high-purity chemicals, specialty solvents, DI water, or other critical process fluids, TechStar delivers complete measurement solutions designed to improve reliability, product quality, and operational performance.

Featured Solution

Yokogawa ROTAMASS TI Coriolis Flowmeter

Ideal Applications

• High-purity chemical blending
• Photoresist manufacturing
• Specialty chemical dosing
• Solvent measurement
• Batch processing
• Precision mass flow applications